ELECTRON-MICROSCOPY STUDY OF DEFECT STRUCTURES IN RECRYSTALLIZED AMORPHOUS LAYERS OF SELF-ION-IRRADIATED (111) SILICON

被引：33
|
作者：
RECHTIN, MD [1 ]
PRONKO, PP [1 ]
FOTI, G [1 ]
CSEPREGI, L [1 ]
KENNEDY, EF [1 ]
MAYER, JW [1 ]
机构：
[1] CALTECH,PASADENA,CA 91125
来源：
PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES | 1978年 / 37卷 / 05期
关键词：
D O I：
10.1080/01418617808239194
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：605 / 620
页数：16
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