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PROPERTIES OF RF SPUTTERED HYDROGENATED AMORPHOUS GERMANIUM-SILICON ALLOYS

被引：18
|
作者：
BANERJEE, PK [1 ]
DUTTA, R [1 ]
MITRA, SS [1 ]
PAUL, DK [1 ]
机构：
[1] HARVARD UNIV,GORDON MCKAY LAB,CAMBRIDGE,MA 02138
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1982年 / 50卷 / 01期
关键词：
D O I：
10.1016/0022-3093(82)90194-6
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1 / 11
页数：11
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