POST-IMPLANTATION AS AN AID IN SCALE CALIBRATION FOR SIMS DEPTH PROFILING

被引：7
|
作者：
ZALM, PC
JANSSEN, KTF
FONTIJN, GM
VRIEZEMA, CJ
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 11期
关键词：
D O I：
10.1002/sia.740141115
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：781 / 786
页数：6
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