POST-IMPLANTATION AS AN AID IN SCALE CALIBRATION FOR SIMS DEPTH PROFILING

被引：7
|
作者：
ZALM, PC
JANSSEN, KTF
FONTIJN, GM
VRIEZEMA, CJ
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 11期
关键词：
D O I：
10.1002/sia.740141115
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：781 / 786
页数：6
相关论文
共 50 条
  • [21] Quantitative calibration and germanium SIMS depth profiling in GexSi1-x/Si heterostructures
    Drozdov, M. N.
    Drozdov, Yu. N.
    Novikov, A. V.
    Yunin, P. A.
    Yurasov, D. V.
    SEMICONDUCTORS, 2014, 48 (08) : 1109 - 1117
  • [22] Molecular profiling of the basement membrane of pluripotent epiblast cells in post-implantation stage mouse embryos
    Futaki, Sugiko
    Nakano, Itsuko
    Kawasaki, Miwa
    Sanzen, Noriko
    Sekiguchi, Kiyotoshi
    REGENERATIVE THERAPY, 2019, 12 : 55 - 65
  • [23] Concentration-depth calibration and bombardment-induced impurity relocation in SIMS depth profiling of shallow through-oxide implantation distributions: a procedure for eliminating the matrix effect
    Wittmaack, K
    SURFACE AND INTERFACE ANALYSIS, 1998, 26 (04) : 290 - 305
  • [24] Multiple As delta layered Si thin films for SIMS quantification and depth scale calibration
    Cho, SB
    Shon, HK
    Kang, HJ
    Hong, TE
    Kim, HK
    Lee, HI
    Kim, KJ
    Moon, DW
    APPLIED SURFACE SCIENCE, 2003, 203 : 302 - 305
  • [25] Damage recovery in ZnO by post-implantation annealing
    Audren, A.
    Hallen, A.
    Linnarsson, M. K.
    Possnert, G.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2010, 268 (11-12): : 1842 - 1846
  • [26] Post-implantation of ions into amorphous carbon films
    Kolitsch, A
    Summchen, L
    Ullmann, J
    Falke, U
    Heger, P
    SURFACE & COATINGS TECHNOLOGY, 1996, 84 (1-3): : 495 - 499
  • [27] Re: Post-Implantation Alterations of Polypropylene in the Human
    Keys, Tristan
    Aboushwareb, Tamer
    Badlani, G.
    JOURNAL OF UROLOGY, 2013, 189 (05): : 1996 - 1997
  • [28] POST-IMPLANTATION DIFFERENTIATION IN THE MOUSE, AND TERATOCARCINOMA DIFFERENTIATION
    GRAHAM, CF
    JOURNAL OF ANATOMY, 1979, 129 (DEC) : 847 - 847
  • [29] Developmental expression of PrP in the post-implantation embryo
    Tremblay, Patrick
    Bouzamondo-Bernstein, Essia
    Heinrich, Cornelia
    Prusiner, Stanley B.
    DeArmond, Stephen J.
    BRAIN RESEARCH, 2007, 1139 : 60 - 67
  • [30] Quantitative SIMS depth profiling for complex multilayers
    Tsinghua Univ, Beijing, China
    Qinghua Daxue Xuebao, 4 (14-18):
12345