RF SPUTTERED STRONTIUM TITANATE FILMS

被引：51
|
作者：
PENNEBAKER, WB
机构：
来源：
IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1969年 / 13卷 / 06期
关键词：
D O I：
10.1147/rd.136.0686
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：686 / +
页数：1
相关论文
共 50 条
  • [1] Optical properties of RF sputtered strontium substituted barium titanate thin films
    Panda, B
    Dhara, A
    Nigam, GD
    Bhattacharya, DB
    Ray, SK
    [J]. THIN SOLID FILMS, 1998, 332 (1-2) : 46 - 49
  • [2] Characterization of sputtered barium strontium titanate and strontium titanate thin films
    Baumert, BA
    Chang, LH
    Matsuda, AT
    Tsai, TL
    Tracy, CJ
    Gregory, RB
    Fejes, PL
    Cave, NG
    Taylor, DJ
    Otsuki, T
    Fujii, E
    Hayashi, S
    Suu, K
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) : 2558 - 2566
  • [3] A study of sputtered barium strontium titanate and strontium titanate thin films
    Baumert, BA
    Chang, LH
    Matsuda, AT
    Tsai, TL
    Tracy, CJ
    Gregory, RB
    Fejes, PL
    Cave, NG
    Chen, W
    Remmel, T
    Taylor, DJ
    Otsuki, T
    Fujii, E
    Hayashi, S
    Suu, K
    [J]. INTEGRATED FERROELECTRICS, 1997, 17 (1-4) : 165 - 178
  • [4] Sputtered barium titanate and barium strontium titanate films for capacitor applications
    Tsao, BH
    Heidger, S
    Weimer, JA
    [J]. PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II, 2001, : 837 - 840
  • [5] Stoichiometric effects of sputtered barium strontium titanate films
    Baumert, BA
    Tsai, TL
    Chang, LH
    Remmel, TP
    Kottke, ML
    Fejes, PL
    Chen, W
    Ehlert, EP
    Sullivan, DF
    Tracy, CJ
    Melnick, BM
    [J]. FERROELECTRIC THIN FILMS VI, 1998, 493 : 21 - 26
  • [6] CHARACTERISTICS OF RF SPUTTERED BARIUM TITANATE THIN FILMS
    PRATT, IH
    [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (10): : 1440 - &
  • [7] ELECTRICAL-CONDUCTIVITY OF SPUTTERED FILMS OF STRONTIUM-TITANATE
    GERBLINGER, J
    MEIXNER, H
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 67 (12) : 7453 - 7459
  • [8] Rf-magnetron sputtered strontium titanate: Structure, processing and property relationships
    Gibbons, BJ
    Fan, Y
    Findikoglu, AT
    Reagor, DW
    Jia, QX
    [J]. MATERIALS ISSUES FOR TUNABLE RF AND MICROWAVE DEVICES, 2000, 603 : 57 - 62
  • [9] FABRICATION OF RF-SPUTTERED BARIUM TITANATE THIN FILMS
    PRATT, IH
    FIRESTONE, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01): : 256 - +
  • [10] CHARACTERISTICS OF RF SPUTTERED BARIUM-TITANATE FILMS ON SILICON
    SALAMA, CAT
    SICIUNAS, E
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 91 - &
12345