CHARACTERISTICS OF RF SPUTTERED BARIUM TITANATE THIN FILMS

被引：28
|
作者：
PRATT, IH
机构：
来源：
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS | 1971年 / 59卷 / 10期
关键词：
D O I：
10.1109/PROC.1971.8452
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1440 / &
相关论文
共 50 条
  • [1] FABRICATION OF RF-SPUTTERED BARIUM TITANATE THIN FILMS
    PRATT, IH
    FIRESTONE, S
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (01): : 256 - +
  • [2] CHARACTERISTICS OF RF SPUTTERED BARIUM-TITANATE FILMS ON SILICON
    SALAMA, CAT
    SICIUNAS, E
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01): : 91 - &
  • [3] Effects of annealing temperature on the photoluminescence of RF sputtered Barium titanate thin films
    Maneeshya, L. V.
    Thomas, P. V.
    Joy, K.
    [J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2015, 30 : 688 - 693
  • [4] Optical properties of RF sputtered strontium substituted barium titanate thin films
    Panda, B
    Dhara, A
    Nigam, GD
    Bhattacharya, DB
    Ray, SK
    [J]. THIN SOLID FILMS, 1998, 332 (1-2) : 46 - 49
  • [5] Characterization of sputtered barium strontium titanate and strontium titanate thin films
    Baumert, BA
    Chang, LH
    Matsuda, AT
    Tsai, TL
    Tracy, CJ
    Gregory, RB
    Fejes, PL
    Cave, NG
    Taylor, DJ
    Otsuki, T
    Fujii, E
    Hayashi, S
    Suu, K
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) : 2558 - 2566
  • [6] A study of sputtered barium strontium titanate and strontium titanate thin films
    Baumert, BA
    Chang, LH
    Matsuda, AT
    Tsai, TL
    Tracy, CJ
    Gregory, RB
    Fejes, PL
    Cave, NG
    Chen, W
    Remmel, T
    Taylor, DJ
    Otsuki, T
    Fujii, E
    Hayashi, S
    Suu, K
    [J]. INTEGRATED FERROELECTRICS, 1997, 17 (1-4) : 165 - 178
  • [7] RF-SPUTTERED FERROELECTRIC BARIUM-TITANATE FILMS ON SILICON
    PANITZ, JKG
    HU, CC
    [J]. FERROELECTRICS, 1980, 27 (1-4) : 161 - 164
  • [8] SPUTTERED THIN-FILMS OF BARIUM-TITANATE ALLOYS
    ORMOND, DW
    CADOFF, IB
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (11) : C469 - C469
  • [9] The properties of barium titanate RF sputtered in argon
    Pencheva, T
    Nenkov, M
    [J]. VACUUM, 1997, 48 (01) : 43 - 48
  • [10] PHASE-FORMATION AND CHARACTERISTICS OF RF-SPUTTERED BARIUM-STRONTIUM TITANATE THIN-FILMS ON VARIOUS BOTTOM LAYERS
    WON, JH
    PAEK, SH
    HWANG, YS
    KIM, KK
    CHO, YS
    [J]. JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1995, 6 (03) : 161 - 164
12345