GENERATION OF SIO2 INTERFACE STATES AT LOW-TEMPERATURE WITH IONIZING IRRADIATION

被引:6
|
作者
BLUZER, N
AFFINITO, D
BLAHA, FC
机构
关键词
D O I
10.1109/TNS.1981.4335677
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:4074 / 4079
页数:6
相关论文
共 50 条
  • [21] HOLE TRANSPORT IN SIO2 AND REOXIDIZED NITRIDED SIO2 GATE INSULATORS AT LOW-TEMPERATURE
    BOESCH, HE
    DUNN, GJ
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1991, 38 (06) : 1083 - 1088
  • [22] ELIMINATION AND GENERATION OF SI-SIO2 INTERFACE TRAPS BY LOW-TEMPERATURE HYDROGEN ANNEALING
    THANH, LD
    BALK, P
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (07) : 1797 - 1801
  • [23] Generation of very fast states by nitridation of the SiO2/SiC interface
    Yoshioka, Hironori
    Nakamura, Takashi
    Kimoto, Tsunenobu
    JOURNAL OF APPLIED PHYSICS, 2012, 112 (02)
  • [24] INP LOW-TEMPERATURE-DEPOSITED SIO2 INTERFACE
    GARDNER, PD
    NARAYAN, SY
    FIRST INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS FOR ADVANCED ELECTRONIC AND OPTICAL DEVICES, 1989, 1144 : 186 - 201
  • [25] LOW-TEMPERATURE PREPARATION OF SIO2 IN MAKING QUARTZ GLASS
    KOSTINA, VM
    LOGINOV, AF
    POTAPOVA, GV
    INORGANIC MATERIALS, 1991, 27 (12) : 2265 - 2269
  • [26] LOW-TEMPERATURE FORMATION OF SiO2 ON METAL LINES.
    Chang, C.A.
    IBM technical disclosure bulletin, 1984, 26 (11): : 5811 - 5812
  • [27] Suppression of microloading effect by low-temperature SiO2 etching
    Sato, Masayuki
    Takehara, Daisuke
    Uda, Keichiro
    Sakiyama, Keizo
    Hara, Tohru
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1992, 31 (12 B): : 4370 - 4375
  • [28] POSITION ANNIHILATION IN SIO2/SI STRUCTURE AT LOW-TEMPERATURE
    UEDONO, A
    MORIYA, T
    TANIGAWA, S
    KAWANO, T
    OHJI, Y
    JOURNAL OF APPLIED PHYSICS, 1995, 78 (05) : 3269 - 3273
  • [29] LOW-TEMPERATURE RECOMBINATION LUMINESCENCE IN AMORPHOUS AND CRYSTALLINE SIO2
    GRINFELDS, AU
    SILIN, AR
    SKUYA, LN
    PLEKHANOV, VG
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 81 (01): : K23 - K26
  • [30] REFLECTANCE SPECTRUM OF CRYSTALLINE AND VITREOUS SIO2 AT LOW-TEMPERATURE
    ROSSINELLI, M
    BOSCH, MA
    PHYSICAL REVIEW B, 1982, 25 (10): : 6482 - 6484