A CRITICAL-REVIEW OF VAPOR-PHASE DEPOSITION METHODS FOR FERROELECTRIC THIN-FILMS

被引：0
|
作者：
KINGON, AI [1 ]
AUCIOLLO, A [1 ]
LICHTENWALNER, D [1 ]
HSIEH, KY [1 ]
机构：
[1] MICROELECTR CTR N CAROLINA,RES TRIANGLE PK,NC
来源：
FERROELECTRICS | 1992年 / 133卷 / 1-4期
关键词：
D O I：
10.1080/00150199208217967
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：3 / 3
页数：1
相关论文
共 50 条
  • [11] ORGANIC VAPOR-PHASE DEPOSITION - A NEW METHOD FOR THE GROWTH OF ORGANIC THIN-FILMS WITH LARGE OPTICAL NONLINEARITIES
    BURROWS, PE
    FORREST, SR
    SAPOCHAK, LS
    SCHWARTZ, J
    FENTER, P
    BUMA, T
    BAN, VS
    FORREST, JL
    JOURNAL OF CRYSTAL GROWTH, 1995, 156 (1-2) : 91 - 98
  • [12] PREPARATION AND DEPOSITION MECHANISM OF FERROELECTRIC PBTIO3 THIN-FILMS BY CHEMICAL VAPOR-DEPOSITION
    YOON, SG
    KIM, HG
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (12) : 3137 - 3140
  • [13] PHYSICAL VAPOR-DEPOSITION OF THIN-FILMS
    JOHNSON, PC
    PLATING AND SURFACE FINISHING, 1989, 76 (06): : 30 - 33
  • [14] STRUCTURE PECULIARITIES OF BISMUTH THIN-FILMS CONDENSED ON NACL FROM VAPOR-PHASE IN VACUUM
    VIGDOROV.VN
    UKHLINOV, GA
    YAKASHVI.DV
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1973, (11): : 119 - &
  • [15] THE POSSIBLE INFLUENCE OF ELECTRIC MOMENTS ON THE GROWTH OF THIN-FILMS OF PYROELECTRICS FROM VAPOR-PHASE
    HORODECKI, AJ
    CRYSTAL RESEARCH AND TECHNOLOGY, 1987, 22 (12) : K227 - K229
  • [16] PHASE-TRANSITIONS IN FERROELECTRIC THIN-FILMS
    SCOTT, JF
    PHASE TRANSITIONS, 1991, 30 (1-4) : 107 - 110
  • [17] METAL-COMPLEXES FOR PREPARING FERROELECTRIC THIN-FILMS BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    NAKAI, T
    TABUCHI, T
    SAWADO, Y
    KOBAYASHI, I
    SUGIMORI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (9B): : 2992 - 2994
  • [18] Chemical deposition methods for ferroelectric thin films
    Waser, R
    Schneller, T
    Ehrhart, P
    Hoffmann-Eifert, S
    FERROELECTRICS, 2001, 259 (1-4) : 205 - 214
  • [19] Kinetics of vapor-phase electrolytic deposition of yttria-stabilized zirconia thin films
    Uchimoto, Y
    Tsutsumi, K
    Ioroi, T
    Ogumi, Z
    Takehara, Z
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (12) : 4277 - 4281
  • [20] PREPARATION OF THIN YTTRIA-STABILIZED ZIRCONIA FILMS BY VAPOR-PHASE ELECTROLYTIC DEPOSITION
    OGUMI, Z
    UCHIMOTO, Y
    TSUJI, Y
    TAKEHARA, Z
    SOLID STATE IONICS, 1992, 58 (3-4) : 345 - 350
12345