INSITU MULTIDIMENSIONAL OBSERVATION OF MASKLESSLY IMPLANTED SITES USING MEV HEAVY-ION MICROPROBES

被引：0
|
作者：
MOKUNO, Y
HORINO, Y
CHAYAHARA, A
KIUCHI, M
FUJII, K
SATOU, M
TAKAI, M
机构：
[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN
[2] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A multi-dimensional structure consisting of two masklessly implanted regions of gold was successfully fabricated into a silicon wafer by 0.6 MeV Au+ and 1.8 MeV Au2+ ion microbeams and this structure was analyzed in-situ by a 3 MeV C2+ ion microprobe. The three-dimensional distribution of gold atoms was observed by complete three-dimensional Rutherford backscattering spectrometry (RBS) mapping and the change in surface condition was clearly observed by ion induced secondary electron (SE) imaging, The advantages of the three-dimensional RBS mapping method have been shown.
引用
收藏
页码：373 / 377
页数：5
相关论文
共 50 条
  • [1] MICROANALYSIS OF MASKLESSLY MEV-ION-IMPLANTED AREA BY MEV HEAVY-ION MICROPROBE
    HORINO, Y
    MOKUNO, Y
    CHAYAHARA, A
    KIUCHI, M
    FUJII, K
    SATOU, M
    TAKAI, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4): : 358 - 361
  • [2] APPLICATION OF MEV HEAVY-ION MICROPROBES FOR PIXE MEASUREMENTS
    MOKUNO, Y
    HORINO, Y
    CHAYAHARA, A
    KIUCHI, M
    FUJII, K
    SATOU, M
    TAKAI, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 77 (1-4): : 128 - 131
  • [3] HEAVY-ION MICROPROBES AND THEIR APPLICATIONS
    TAKAI, M
    HORINO, Y
    MOKUNO, Y
    CHAYAHARA, A
    KIUCHI, M
    FUJII, K
    SATOU, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 77 (1-4): : 8 - 16
  • [4] ANALYSIS OF IRON BY PIXE USING HEAVY-ION MICROPROBES
    HORINO, Y
    MOKUNO, Y
    TSUBOUCHI, N
    KINOMURA, A
    CHAYAHARA, A
    FUJII, K
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 104 (1-4): : 49 - 51
  • [5] INSITU OBSERVATION OF CASCADE DAMAGE UNDER HEAVY-ION IRRADIATION
    SEKIMURA, N
    ISHINO, S
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1992, 124 (01): : 109 - 116
  • [6] INSITU OBSERVATION OF CASCADE DAMAGE IN NICKEL AND COPPER UNDER HEAVY-ION IRRADIATION
    SAKAIDA, H
    SEKIMURA, N
    ISHINO, S
    [J]. JOURNAL OF NUCLEAR MATERIALS, 1991, 179 : 928 - 930
  • [7] DIRECT OBSERVATION OF CASCADE DEFECTS BY INSITU HEAVY-ION ELECTRON-MICROSCOPE INTERFACE
    ISHINO, S
    [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1990, 113 (1-3): : 29 - 37
  • [8] DISORDER SATURATION IN HEAVY-ION IMPLANTED SEMICONDUCTORS
    TOGNETTI, NP
    ELLIMAN, RG
    CARTER, G
    [J]. VACUUM, 1983, 33 (03) : 165 - 169
  • [9] MICROSCOPIC CHARACTERIZATION OF HEAVY-ION IMPLANTED DIAMOND
    BURCHARD, A
    RESTLE, M
    DEICHER, M
    HOFSASS, H
    JAHN, SG
    KONIG, T
    MAGERLE, R
    PFEIFFER, W
    WAHL, U
    [J]. PHYSICA B, 1993, 185 (1-4): : 150 - 153
  • [10] MULTIDIMENSIONAL MODEL OF SUBBARRIER HEAVY-ION FUSION
    DENISOV, VY
    ROYER, G
    [J]. PHYSICS OF ATOMIC NUCLEI, 1995, 58 (03) : 397 - 401
12345