INSITU MULTIDIMENSIONAL OBSERVATION OF MASKLESSLY IMPLANTED SITES USING MEV HEAVY-ION MICROPROBES

被引：0

作者：

MOKUNO, Y

HORINO, Y

CHAYAHARA, A

KIUCHI, M

FUJII, K

SATOU, M

TAKAI, M

机构：

[1] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

[2] OSAKA UNIV,EXTREME MAT RES CTR,TOYONAKA,OSAKA 560,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 77卷 / 1-4期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A multi-dimensional structure consisting of two masklessly implanted regions of gold was successfully fabricated into a silicon wafer by 0.6 MeV Au+ and 1.8 MeV Au2+ ion microbeams and this structure was analyzed in-situ by a 3 MeV C2+ ion microprobe. The three-dimensional distribution of gold atoms was observed by complete three-dimensional Rutherford backscattering spectrometry (RBS) mapping and the change in surface condition was clearly observed by ion induced secondary electron (SE) imaging, The advantages of the three-dimensional RBS mapping method have been shown.

引用

页码：373 / 377

页数：5

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