EFFECT OF COULOMB SCATTERING ON SILICON SURFACE MOBILITY

被引:52
|
作者
CHENG, YC [1 ]
SULLIVAN, EA [1 ]
机构
[1] BELL NO RES,OTTAWA,ONTARIO,CANADA
关键词
D O I
10.1063/1.1662957
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:187 / 192
页数:6
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