ON THE SCALING PROPERTY OF TRENCH ISOLATION CAPACITANCE FOR ADVANCED HIGH-PERFORMANCE ECL CIRCUITS

被引：2
|
作者：
LU, PF
CHUANG, CT
机构：
[1] IBM Research Division, T. J. Watson Research Center, Yorktown Heights
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1990年 / 37卷 / 10期
关键词：
11;
D O I：
10.1109/16.59920
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A detailed study on the scaling property trench isolation capacitance for advanced high-performance bipolar applications is presented. It is shown that the trench isolation capacitance depends on the trench structure, particularly the trench bottom and the trench fill. The dependence of the trench isolation capacitance on the trench width is then analyzed for various commonly used trench structures. The impact on the scaled-down high-performance ECL circuits is presented. © 1990 IEEE
引用
收藏
页码：2270 / 2274
页数：5
相关论文
共 50 条
  • [1] ON THE SCALING PROPERTY OF TRENCH ISOLATION CAPACITANCE FOR ADVANCED HIGH-PERFORMANCE ECL CIRCUITS
    CHUANG, CT
    LU, PF
    1989 INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, 1989, : 799 - 802
  • [2] High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
    Sarajlic, Edin
    Yamahata, Christophe
    Berenschot, Erwin
    Tas, Niels
    Fujita, Hiroyuki
    Krijnen, Gijs
    MICROMACHINES, 2010, 1 (02): : 48 - 67
  • [3] ECL CLOCKS FOR HIGH-PERFORMANCE RISC WORKSTATIONS
    LETTANG, FJ
    HEWLETT-PACKARD JOURNAL, 1992, 43 (04): : 23 - 25
  • [4] HIGH-PERFORMANCE AUDIO CIRCUITS - ADVANCED ICS ENHANCE AUDIO APPLICATIONS
    PRYCE, D
    EDN, 1993, 38 (06) : 83 - &
  • [5] HIGH CAPACITANCE ISOLATED SURROUNDING STACKED TRENCH CELL FOR ADVANCED DRAMS
    HOFMANN, F
    HANSCH, W
    GEIB, H
    ROSNER, W
    TAKACS, D
    RISCH, L
    MICROELECTRONIC ENGINEERING, 1991, 15 (1-4) : 359 - 362
  • [6] High capacitance isolated surrounding stacked trench cell for advanced DRAMs
    Hofmann, F., 1600, (15): : 1 - 4
  • [7] AN ADVANCED HIGH-PERFORMANCE TRENCH-ISOLATED SELF-ALIGNED BIPOLAR TECHNOLOGY
    LI, GP
    NING, TH
    CHUANG, CT
    KETCHEN, MB
    TANG, DDL
    MAUER, J
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (11) : 2246 - 2254
  • [8] A HIGH-PERFORMANCE, VARIABLE CAPACITANCE ACCELEROMETER
    WILNER, LB
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1988, 37 (04) : 569 - 571
  • [9] Advanced integration schemes for high-functionality/high-performance photonic integrated circuits
    Raring, James W.
    Sysak, Matthew N.
    Tauke-Pedretti, Anna
    Dummer, Mathew
    Skogen, Erik J.
    Barton, Jonathon S.
    DenBaars, S. P.
    Coldren, Larry A.
    PHOTONICS PACKAGING AND INTEGRATION VI, 2006, 6126
  • [10] HIGH-PERFORMANCE COMPUTING WITH DUAL ALU ARCHITECTURE AND ECL LOGIC
    AMERSON, FC
    LINSKY, MS
    TOSCHI, EA
    HEWLETT-PACKARD JOURNAL, 1982, 33 (03): : 3 - &
12345