THE APPLICATION OF LOW-VOLTAGE SCANNING ELECTRON-MICROSCOPY FOR THE ANALYSIS OF VLSI DEVICES

被引：2

|

作者：

WOODWARD, M

JONES, DR

机构：

来源：

SCANNING | 1989年 / 11卷 / 04期

关键词：

D O I：

10.1002/sca.4950110407

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

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页码：199 / 204

页数：6

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