THE APPLICATION OF LOW-VOLTAGE SCANNING ELECTRON-MICROSCOPY FOR THE ANALYSIS OF VLSI DEVICES

被引：2
|
作者：
WOODWARD, M
JONES, DR
机构：
来源：
SCANNING | 1989年 / 11卷 / 04期
关键词：
D O I：
10.1002/sca.4950110407
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：199 / 204
页数：6
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