INFLUENCE OF DEEP TRAPS ON MEASUREMENT OF FREE-CARRIER DISTRIBUTIONS IN SEMICONDUCTORS BY JUNCTION CAPACITANCE TECHNIQUES

被引:269
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作者
KIMERLING, LC [1 ]
机构
[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA
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D O I
10.1063/1.1663500
中图分类号
O59 [应用物理学];
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页码:1839 / 1845
页数:7
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