EFFECTS OF PHOTO-ELECTRONS AND AUGER ELECTRONS ON CONTRAST AND RESOLUTION IN X-RAY-LITHOGRAPHY

被引：10
|
作者：
SAITOH, Y
YOSHIHARA, H
WATANABE, I
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 01期
关键词：
D O I：
10.1143/JJAP.21.L52
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L52 / L54
页数：3
相关论文
共 50 条
  • [41] Longitudinal asymmetry in the direction of ejection of photo-electrons
    de Foe, OK
    PHILOSOPHICAL MAGAZINE, 1925, 49 (293): : 817 - 824
  • [42] ANGULAR DISTRIBUTION OF NOBLE GAS PHOTO-ELECTRONS
    MANSON, ST
    KENNEDY, DJ
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1971, 16 (04): : 565 - &
  • [43] FLUCTUATIONS OF PHOTON BEAMS - THE DISTRIBUTION OF THE PHOTO-ELECTRONS
    MANDEL, L
    PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1959, 74 (477): : 233 - 243
  • [44] SPIN POLARIZED PHOTO-ELECTRONS FROM TUNGSTEN
    ZUERCHER, P
    MEIER, F
    HELVETICA PHYSICA ACTA, 1978, 51 (01): : 21 - 21
  • [45] HARD RADIATION EFFECTS IN X-RAY-LITHOGRAPHY
    ZNAMIROWSKI, Z
    CZARCZYNSKI, W
    ELECTRONICS LETTERS, 1980, 16 (05) : 178 - 179
  • [46] On the dynamics of photo-electrons in C60
    Gao, C-Z
    Wopperer, P.
    Dinh, P. M.
    Suraud, E.
    Reinhard, P-G
    JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 2015, 48 (10) : 1 - 11
  • [47] PHOTO-ELECTRONS AND ELECTRON TEMPERATURES IN VENUS IONOSPHERE
    BUTLER, DM
    STOLARSKI, RS
    JOURNAL OF GEOPHYSICAL RESEARCH-SPACE PHYSICS, 1978, 83 (NA5): : 2057 - 2065
  • [48] CALCULATING THE INTENSITY OF THE CHARACTERISTIC X-RAY-RADIATION EXCITED BY THE PHOTO-ELECTRONS OF A SAMPLE BEING ANALYZED
    AFONIN, VP
    PISKUNOVA, LF
    INDUSTRIAL LABORATORY, 1978, 44 (09): : 1224 - 1225
  • [49] ANGULAR-DISTRIBUTION OF X-RAY PHOTO-ELECTRONS FROM NIO MONO-CRYSTALS
    THULER, M
    BRUNNER, J
    HELVETICA PHYSICA ACTA, 1978, 51 (04): : 465 - 470
  • [50] SEARCH FOR POLARIZED PHOTO-ELECTRONS FROM MOLECULES
    HEINZMANN, U
    KESSLER, J
    KUHLMANN, E
    JOURNAL OF CHEMICAL PHYSICS, 1978, 68 (10): : 4753 - 4754
12345