EFFECTS OF PHOTO-ELECTRONS AND AUGER ELECTRONS ON CONTRAST AND RESOLUTION IN X-RAY-LITHOGRAPHY

被引：10

作者：

SAITOH, Y

YOSHIHARA, H

WATANABE, I

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1982年 / 21卷 / 01期

关键词：

D O I：

10.1143/JJAP.21.L52

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L52 / L54

页数：3

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