DEFECTS ASSOCIATED WITH DIFFUSION OF PHOSPHORUS INTO SILICON

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作者：
RAGIMOV, IA
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来源：
SOVIET PHYSICS CRYSTALLOGRAPHY, USSR | 1972年 / 16卷 / 05期
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O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
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页码：918 / &
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