OPEN TUBE DIFFUSION OF PHOSPHORUS IN SILICON

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作者：

GREIG, WJ

SARACE, JC

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1961年 / 108卷 / 08期

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中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

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页码：C175 / C175

页数：1

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