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SELECTION OF METHOD FOR ESTIMATING THE INHOMOGENEITY OF LARGE-DIAMETER INDUSTRIAL SILICON-CRYSTALS
被引:0
|
作者
:
YUROVA, ES
论文数:
0
引用数:
0
h-index:
0
YUROVA, ES
SHVEDOVA, OI
论文数:
0
引用数:
0
h-index:
0
SHVEDOVA, OI
KANEVSKAYA, VM
论文数:
0
引用数:
0
h-index:
0
KANEVSKAYA, VM
TARASOV, VK
论文数:
0
引用数:
0
h-index:
0
TARASOV, VK
机构
:
来源
:
INDUSTRIAL LABORATORY
|
1990年
/ 56卷
/ 10期
关键词
:
D O I
:
暂无
中图分类号
:
TH7 [仪器、仪表];
学科分类号
:
0804 ;
080401 ;
081102 ;
摘要
:
引用
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页码:1192 / 1194
页数:3
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