NUMERICAL SIMULATION OF IMPURITIES DIFFUSION IN SILICON - APPLICATIONS

被引：0
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作者：
MONNIER, J
VANDORPE, D
STERN, M
CHAMBERT, G
HILLERET, N
MAFFEI, A
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1972年 / 119卷 / 08期
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
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页码：C239 / &
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