Specimen Preparation in Atom Probe by FIB-Based Method

被引：0

作者：

Hanaoka, Yuya ^{[1
]}

Yamamoto, Takuya ^{[1
]}

Mayama, Norihito ^{[1
]}

Kaito, Takashi ^{[2
]}

Owari, Masanori ^{[1
,3
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, 4-6-1 Komaba, Tokyo 1538505, Japan

[2] SII NanoTechnology Inc, Santogun, Shizuoka 4101393, Japan

[3] Univ Tokyo, Environm Sci Ctr, Bunkyo Ku, Tokyo 1130033, Japan

来源：

E-JOURNAL OF SURFACE SCIENCE AND NANOTECHNOLOGY | 2011年 / 9卷

基金：

日本学术振兴会;

关键词：

Atom probe; Focused ion beam; Specimen preparation;

D O I：

10.1380/ejssnt.2011.348

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In our previous study, we proposed the optimum specimen preparation method in atom probe analysis, in which the analytical part was attached to the support needle by the physical strength of carbon deposition in connected hole. The optimum method was concluded from the point of view of the strength at the attachment part under high electric stress and fabrication feasibility. In this study, the rupture frequency of the specimens and the fabrication time were also evaluated, and an optimum method was reexamined. As a result, it was concluded that the optimum methods were the methods in which the analytical part was attached to the support needle by the physical strength of carbon deposition in connected hole and by the physical strength of the hooked joint of analytical part and support needle.

引用

页码：348 / 351

页数：4

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