ELLIPSOMETRIC ANALYSIS OF REFRACTIVE-INDEX PROFILES PRODUCED BY ION-IMPLANTATION IN SILICA GLASS

被引:23
|
作者
BAYLY, AR [1 ]
TOWNSEND, PD [1 ]
机构
[1] UNIV SUSSEX,SCH MATH & PHYS SCI,BRIGHTON BN1 9QH,SUSSEX,ENGLAND
关键词
D O I
10.1088/0022-3727/6/9/316
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1115 / 1128
页数:14
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