ANGULAR-DISTRIBUTION IN SPUTTERING OF METALS BY 10 KEV INERT-GAS IONS

被引：0

作者：

HILDEBRANDT, D ^{[1
]}

MANNS, R ^{[1
]}

机构：

[1] HUMBOLDT UNIV,BEREICH ANGEW MASSESSPEKTROMETRIE,SEKT PHYS,DDR-104 BERLIN,GER DEM REP

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1979年 / 51卷 / 02期

关键词：

D O I：

10.1002/pssa.2210510256

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：K151 / K154

页数：4

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