TOPOGRAPHICAL FEATURES OF ROTATED AUGER SAMPLES SPUTTERED WITH INERT-GAS IONS

The effect of sample rotation on the ion-induced surface roughening for multilayer Auger samples is described using preliminary scanning electron microscopy. The surface roughness amplitude of Cu/Ag sandwiches bombarded with 1–3 keV Ar +and Xe +ions was found to be dramatically reduced by sample rotation, resulting in a significant improvement in depth resolution, especially for Ar +-bombarded samples. The sputtered surfaces of rotated samples were characterized by planar crystals developed thereon, forming a striking contrast to the stationary sample surfaces thickly covered with conical microprojections. The mechanism of this two-dimensional crystal growth is discussed briefly, in terms of surface atom mobility enhanced by ion impact. © 1990, American Vacuum Society. All rights reserved.