REFRACTORY-METALS IN SUB-MICRON IC ARCHITECTURE

被引：1
|
作者：
DIESBURG, DE [1 ]
CASTEL, ED [1 ]
机构：
[1] NATL SEMICOND CORP,SANTA CLARA,CA 95051
来源：
JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY | 1989年 / 41卷 / 06期
关键词：
D O I：
10.1007/BF03220245
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：23 / 26
页数：4
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