SUB-MICRON IDT FABRICATION

被引：0

作者：

VANDENBERG, HAM ^{[1
]}

HUMPHRYES, RF ^{[1
]}

RUIGROK, JJM ^{[1
]}

VENEMA, A ^{[1
]}

机构：

[1] DELFT UNIV TECHNOL,DEPT ELECT ENGN,DELFT,NETHERLANDS

来源：

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1978年 / 25卷 / 04期

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

引用

页码：232 / 232

页数：1

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