REFRACTORY-METALS IN SUB-MICRON IC ARCHITECTURE

被引：1

作者：

DIESBURG, DE ^{[1
]}

CASTEL, ED ^{[1
]}

机构：

[1] NATL SEMICOND CORP,SANTA CLARA,CA 95051

来源：

JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY | 1989年 / 41卷 / 06期

关键词：

D O I：

10.1007/BF03220245

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：23 / 26

页数：4

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