PREPARING AMORPHOUS HYDROGENATED SILICON FILMS IN A MULTIELECTRODE SYSTEM

被引：0
|
作者：
MEZDROGINA, MM
GOLIKOVA, OA
KAZANIN, MM
KUDOYAROVA, VK
YUSHKA, GB
ARLAUSKAS, KL
BARDAMID, AF
KHAIDAROV, RA
SOROKINA, KL
机构：
来源：
INORGANIC MATERIALS | 1991年 / 27卷 / 04期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：551 / 555
页数：5
相关论文
共 50 条
  • [31] INTERACTION OF HYDROGENATED AMORPHOUS-SILICON FILMS WITH TRANSPARENT CONDUCTIVE FILMS
    KITAGAWA, M
    MORI, K
    ISHIHARA, S
    OHNO, M
    HIRAO, T
    YOSHIOKA, Y
    KOHIKI, S
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) : 3269 - 3271
  • [32] Hydrogenated amorphous silicon/nanodisperse metal (SIMAL) system - films of unique electronic properties
    Druesedau, Tilo P.
    Panckow, Andreas N.
    Klabunde, Frank
    Journal of Non-Crystalline Solids, 1996, 198-200 (pt 2): : 829 - 832
  • [33] The hydrogenated amorphous silicon/nanodisperse metal (Simal) system - Films of unique electronic properties
    Drusedau, TP
    Panckow, AN
    Klabunde, F
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1996, 198 : 829 - 832
  • [34] Improvement on the conventional MWECR-CVD system and preparation of hydrogenated amorphous silicon films
    Chen, GH
    Zhu, XH
    Yin, SY
    Hu, YH
    Zhang, WL
    VACUUM, 2005, 77 (03) : 355 - 358
  • [35] SIMPLE METHOD FOR PREPARING HYDROGENATED AMORPHOUS-SILICON FILMS BY CHEMICAL VAPOR-DEPOSITION AT ATMOSPHERIC-PRESSURE
    ELLIS, FB
    GORDON, RG
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) : 5381 - 5384
  • [36] Laser annealing of hydrogenated amorphous silicon-carbon films
    Coscia, U
    Ambrosone, G
    Minarini, C
    Parisi, V
    Schutzmann, S
    Tebano, A
    Restello, S
    Rigato, V
    THIN SOLID FILMS, 2004, 453 : 7 - 12
  • [37] PHYSICAL PROPERTIES AND MICROSTRUCTURE OF AMORPHOUS HYDROGENATED SILICON FILMS.
    Mezdrogina, M.M.
    Kudoyarova, V.Kh.
    Bardamid, A.F.
    Novosel'skaya, A.I.
    Neorganiceskie materialy, 1987, 23 (06): : 883 - 887
  • [38] PHYSICAL CHARACTERIZATION OF HALOGENATED AND HYDROGENATED AMORPHOUS-SILICON FILMS
    AUGELLI, V
    MURRI, R
    GALASSINI, S
    TEPORE, A
    THIN SOLID FILMS, 1980, 69 (03) : 315 - 320
  • [39] PHOTOCONDUCTIVITY AND TRAPPING PARAMETERS IN HYDROGENATED AMORPHOUS-SILICON FILMS
    GALASSINI, S
    MICOCCI, G
    PENNETTA, C
    RIZZO, A
    TEPORE, A
    ZUANNI, F
    MATERIALS CHEMISTRY AND PHYSICS, 1983, 9 (1-3) : 295 - 300
  • [40] Fracture properties of hydrogenated amorphous silicon carbide thin films
    Matsuda, Y.
    King, S. W.
    Bielefeld, J.
    Xu, J.
    Dauskardt, R. H.
    ACTA MATERIALIA, 2012, 60 (02) : 682 - 691
12345