PREPARING AMORPHOUS HYDROGENATED SILICON FILMS IN A MULTIELECTRODE SYSTEM

被引：0
|
作者：
MEZDROGINA, MM
GOLIKOVA, OA
KAZANIN, MM
KUDOYAROVA, VK
YUSHKA, GB
ARLAUSKAS, KL
BARDAMID, AF
KHAIDAROV, RA
SOROKINA, KL
机构：
来源：
INORGANIC MATERIALS | 1991年 / 27卷 / 04期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：551 / 555
页数：5
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