CREEP AND DISLOCATION VELOCITIES IN GALLIUM-ARSENIDE

被引：89

作者：

STEINHARDT, H ^{[1
]}

HAASEN, P ^{[1
]}

机构：

[1] DEUTSCH FORSCHUNGSGEMEINSCHAFT,SONDERFORSCHUNGSBEREICH 126,GOTTINGEN,FED REP GER

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1978年 / 49卷 / 01期

关键词：

D O I：

10.1002/pssa.2210490110

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：93 / 101

页数：9

共 50 条

[31] A STUDY OF GALLIUM-ARSENIDE AND ALUMINUM GALLIUM-ARSENIDE REACTIVE ION ETCHING PARAMETERS
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[J]. PHYSICA B & C, 1983, 116 (1-3): : 629 - 634
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