LINE-WIDTH CONTROL IN ELECTRON-BEAM LITHOGRAPHY

被引：0
|
作者：
PHANG, JCH
AHMED, H
机构：
来源：
ELECTRONICS LETTERS | 1978年 / 14卷 / 12期
关键词：
D O I：
10.1049/el:19780258
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：382 / 384
页数：3
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