SPUTTERING OF SOLIDS UNDER LIGHT-ION BOMBARDMENT

被引：4

作者：

MANUKHIN, VV

机构：

[1] Physics and Nuclear Fusion Department of Moscow Power Engineering Institute

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 72卷 / 01期

关键词：

D O I：

10.1016/0168-583X(92)95279-Z

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An analytical theory of sputtering of amorphous solids by light-ion bombardment is presented. It is based on the following two mechanisms: sputtering due to incident ions directly, and sputtering due to backscattered ions, which includes the effects caused by knocked-off atoms. Calculated sputter yields are compared with Monte Carlo simulation data.

引用

页码：45 / 50

页数：6

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