ANGLE OF INCIDENCE DEPENDENCE OF LIGHT-ION PHYSICAL SPUTTERING OF CARBON

被引：11

作者：

HAASZ, AA ^{[1
]}

DAVIS, JW ^{[1
]}

WU, CH ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,NET TEAM,D-8046 GARCHING,FED REP GER

来源：

JOURNAL OF NUCLEAR MATERIALS | 1989年 / 162卷

关键词：

D O I：

10.1016/0022-3115(89)90385-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：915 / 919

页数：5

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