ANGLE OF INCIDENCE DEPENDENCE OF LIGHT-ION PHYSICAL SPUTTERING OF CARBON

被引：11
|
作者：
HAASZ, AA [1 ]
DAVIS, JW [1 ]
WU, CH [1 ]
机构：
[1] MAX PLANCK INST PLASMA PHYS,NET TEAM,D-8046 GARCHING,FED REP GER
来源：
JOURNAL OF NUCLEAR MATERIALS | 1989年 / 162卷
关键词：
D O I：
10.1016/0022-3115(89)90385-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：915 / 919
页数：5
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