EFSA - A NEW EVALUATION METHOD OF THE DEPTH RESOLUTION IN DEPTH PROFILING OF MULTILAYER STRUCTURES

被引：4
|
作者：
MARTON, D [1 ]
LASZLO, J [1 ]
GIBER, J [1 ]
RUDENAUER, FG [1 ]
机构：
[1] AUSTRIAN RES CTR SIEBERSDORF,A-1082 SIEBERSDORF,AUSTRIA
来源：
VACUUM | 1985年 / 35卷 / 12期
关键词：
D O I：
10.1016/0042-207X(85)90308-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：523 / 526
页数：4
相关论文
共 50 条
  • [1] IMPROVED METHOD FOR DEPTH PROFILING OF MULTILAYER STRUCTURES
    HORANYI, TS
    TUTTO, P
    ENDREDI, G
    [J]. APPLIED SURFACE SCIENCE, 1991, 50 (1-4) : 143 - 148
  • [2] NEW NONDESTRUCTIVE COMPOSITION DEPTH PROFILING METHOD FOR DIAGNOSTICS OF MULTILAYER QUANTUM-WELL STRUCTURES
    KONNIKOV, SG
    POGREBITSKY, KJ
    [J]. SURFACE SCIENCE, 1990, 228 (1-3) : 532 - 537
  • [3] Optimization of depth resolution parameters in AES sputter profiling of GaAs/AlAs multilayer structures
    Rar, A.
    Hofmann, S.
    Yoshihara, K.
    Kajiwara, K.
    [J]. Applied Surface Science, 1999, 144 : 310 - 314
  • [4] Optimization of depth resolution parameters in AES sputter profiling of GaAs AlAs multilayer structures
    Rar, A
    Hofmann, S
    Yoshihara, K
    Kajiwara, K
    [J]. APPLIED SURFACE SCIENCE, 1999, 144-45 : 310 - 314
  • [5] ALTERNATIVE MODEL MULTILAYER STRUCTURES FOR DEPTH PROFILING STUDIES
    ZALAR, A
    PANJAN, P
    KRASEVEC, V
    HOFMANN, S
    [J]. SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) : 50 - 54
  • [6] DEPTH PROFILING OF CU-CR MULTILAYER STRUCTURES
    LASZLO, J
    MARTON, D
    GIBER, J
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 18 (4-6): : 662 - 665
  • [7] A NEW METHOD FOR DEPTH PROFILING
    CHAUDHRI, MA
    CHITTLEBOROUGH, CW
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 197 (01): : 37 - 39
  • [8] Pressure influence on the depth resolution of rf-glow discharge depth profiling of multilayer coatings
    Hodoroaba, VD
    Wirth, T
    [J]. JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1999, 14 (09) : 1533 - 1535
  • [9] DEPTH PROFILING OF Cu-Cr MULTILAYER STRUCTURES.
    Laszlo, J.
    Marton, D.
    Giber, J.
    [J]. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B18 (4-6) : 662 - 665
  • [10] Oxygen depth profiling with subnanometre depth resolution
    Kosmata, Marcel
    Munnik, Frans
    Hanf, Daniel
    Groetzschel, Rainer
    Crocoll, Sonja
    Moeller, Wolfhard
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2014, 337 : 27 - 33
12345