GENERATION OF COMPLEX-IONS DUE TO THE SPUTTERING OF MULTICOMPONENT OXIDES

被引:0
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作者
PANICHKIN, IY
CHENAKIN, SP
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ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI | 1995年 / 108卷 / 02期
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O4 [物理学];
学科分类号
0702 ;
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页码:676 / 685
页数:10
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