GENERATION OF COMPLEX-IONS DUE TO THE SPUTTERING OF MULTICOMPONENT OXIDES

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作者：

PANICHKIN, IY

CHENAKIN, SP

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ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI | 1995年 / 108卷 / 02期

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O4 [物理学];

学科分类号：

0702 ;

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页码：676 / 685

页数：10

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