INFLUENCE OF AN RF PLASMA ON THE OPTICAL AND STRUCTURAL-PROPERTIES OF VACUUM-DEPOSITED DIELECTRIC COATINGS

被引：1
|
作者：
HERRMANN, R
LOTZ, HG
MULLER, J
MUNZ, WD
VOGT, H
机构：
来源：
THIN SOLID FILMS | 1985年 / 127卷 / 3-4期
关键词：
D O I：
10.1016/0040-6090(85)90204-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：351 / 364
页数：14
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