SYNTHESIS OF BETA-FESI2 FILM BY REACTIVE DEPOSITION - SOLID-PHASE EPITAXY

被引：0
|
作者：
WANG, LW
SHEN, QW
CHEN, XD
LIN, X
LIN, CG
ZOU, SC
机构：
来源：
CHINESE PHYSICS LETTERS | 1995年 / 12卷 / 05期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Reactive deposition--solid phase epitaxy has been developed for the epitaxial growth of thick beta-FeSi2 film. Compared with the solid phase epitaxy, the crystal quality was improved. The orientation relationship mainly depends on the depositing condition. Observation by transmission electron microscope revealed the polycrystalline nature and the mean crystallite size was about 200 nm.
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页码：301 / 304
页数：4
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