EFFECTS OF TEMPERATURE ON SOLID-PHASE EPITAXY OF SILICON

被引：1
|
作者：
LIAU, ZL [1 ]
LAU, SS [1 ]
NICOLET, MA [1 ]
MAYER, JW [1 ]
机构：
[1] CALTECH,PASADENA,CA 91109
来源：
THIN SOLID FILMS | 1977年 / 46卷 / 01期
关键词：
D O I：
10.1016/0040-6090(77)90344-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：93 / 98
页数：6
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