DETERMINATION OF THE IMPURITY NONUNIFORMITY OF SEMICONDUCTOR SINGLE-CRYSTALS BY INTERFERENCE MICROSCOPY

被引：0

作者：

RONDAREV, VS

机构：

来源：

MEASUREMENT TECHNIQUES USSR | 1982年 / 25卷 / 04期

关键词：

D O I：

10.1007/BF00827414

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：323 / 323

页数：1

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