INTERFACE CHARACTERISTICS OF SILICON-SILICON NITRIDE STRUCTURES

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作者：
CHU, TL
SZEDON, JR
LEE, CH
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JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1966年 / 113卷 / 08期
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O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
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页码：C214 / &
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