ALPHA-RF AND GAMMA-RF CAPACITATIVE DISCHARGES IN N-2 AT INTERMEDIATE PRESSURES

被引：55

|

作者：

VIDAUD, P

DURRANI, SMA

HALL, DR

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1988年 / 21卷 / 01期

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D O I：

10.1088/0022-3727/21/1/009

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：57 / 66

页数：10

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