ALPHA-RF AND GAMMA-RF CAPACITATIVE DISCHARGES IN N-2 AT INTERMEDIATE PRESSURES

被引：55
|
作者：
VIDAUD, P
DURRANI, SMA
HALL, DR
机构：
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1988年 / 21卷 / 01期
关键词：
D O I：
10.1088/0022-3727/21/1/009
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：57 / 66
页数：10
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