MEV ION-BEAM ANALYSIS

被引：2
|
作者：
COOKSON, JA
CONLON, TW
机构：
[1] UKAEA, United Kingdom
来源：
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS | 1988年 / 93卷 / 03期
关键词：
Ions--Scattering - Mass Spectrometers - Solids--Analysis - X-ray Analysis;
D O I：
10.6028/jres.093.123
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The main techniques traditionally used in Mev Ion Beam Analysis are Particle Induced X-ray Emission (PIXE), Rutherford Backscattering (RBS) and Nuclear Reaction Analysis (NRA), which, broadly speaking, utilize light (m&le4) ions. This review will treat these techniques only with regard to improvements in their quantification. Both the light and heavy ion techniques can be applied either in the broad beam or microbeam mode. New developments are taking place in the production and focusing of micrometer size beams for analysis where lateral resolution is important. These advances, which could revolutionize the prospects for microbeam systems, are described.
引用
收藏
页码：473 / 478
页数：6
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