MEV ION-BEAM ANALYSIS

被引：2
|
作者：
COOKSON, JA
CONLON, TW
机构：
来源：
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS | 1988年 / 93卷 / 03期
关键词：
D O I：
10.6028/jres.093.123
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：473 / 478
页数：6
相关论文
共 50 条
  • [1] MEV ION-BEAM TECHNIQUES - AN OUTLINE
    AMSEL, G
    HEITZ, C
    MENU, M
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 14 (01): : 30 - 37
  • [2] MEV ION-BEAM LITHOGRAPHY OF PMMA
    BREESE, MBH
    GRIME, GW
    WATT, F
    WILLIAMS, D
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 77 (1-4): : 169 - 174
  • [3] RBS ANALYSIS OF BEAM-PROCESSED MICROAREA BY FOCUSED MEV ION-BEAM
    KINOMURA, A
    TAKAI, M
    MATSUO, T
    UJIIE, S
    NAMBA, S
    SATOU, M
    KIUCHI, M
    FUJII, K
    SHIOKAWA, T
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 40 - 42
  • [4] ION-BEAM DEPOSITION AND INSITU ION-BEAM ANALYSIS
    ALBAYATI, AH
    ORRMANROSSITER, KG
    ARMOUR, DG
    VANDENBERG, JA
    DONNELLY, SE
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 63 (1-2): : 109 - 119
  • [5] MICROANALYSIS BY FOCUSED MEV HELIUM ION-BEAM
    TAKAI, M
    MATSUNAGA, K
    INOUE, K
    IZUMI, M
    GAMO, K
    SATO, M
    NAMBA, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1987, 26 (05): : L550 - L553
  • [6] MEV HELIUM ION-BEAM ETCHING OF POLYTETRAFLUOROETHYLENE
    TORRISI, L
    CALCAGNO, L
    FOTI, AM
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1988, 32 (1-4): : 142 - 144
  • [7] MEV ION-BEAM ANNEALING OF SEMICONDUCTOR STRUCTURES
    WILLIAMS, JS
    RIDGWAY, MC
    ELLIMAN, RG
    DAVIES, JA
    JOHNSON, ST
    PALMER, GR
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 55 (1-4): : 602 - 606
  • [8] MEV ION-BEAM ANALYSIS OF HIGH-TC SUPERCONDUCTING FILMS
    LEAVITT, JA
    MCINTYRE, LC
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 797 - 800
  • [9] ION-BEAM ANALYSIS
    ROBINSON, AL
    [J]. SCIENCE, 1976, 193 (4258) : 1070 - 1070
  • [10] ION-BEAM ANALYSIS
    FUJIMOTO, F
    [J]. BUNSEKI KAGAKU, 1991, 40 (11) : 577 - 597
12345