ADVANCED DEVICE ISOLATION FOR VERY LARGE-SCALE INTEGRATION

被引：0

|

作者：

POGGE, HB

机构：

来源：

ACS SYMPOSIUM SERIES | 1985年 / 290卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

收藏

页码：241 / 275

页数：35

相关论文

共 50 条

[1] ISOLATION TECHNIQUES FOR VERY LARGE-SCALE INTEGRATION
BEERNAERT, D
SCHOLS, G
VANISEGHEM, P
[J]. ELECTRICAL COMMUNICATION, 1982, 57 (02): : 161 - 166
[2] VERY LARGE-SCALE INTEGRATION IN MICROELECTRONICS
LARDY, JL
[J]. RECHERCHE, 1980, 11 (116): : 1246 - 1256
[3] VERY LARGE-SCALE INTEGRATION 1983
不详
[J]. MICROPROCESSING AND MICROPROGRAMMING, 1984, 13 (02): : 121 - 130
[4] VERY LARGE-SCALE INTEGRATION TO BE VERY BIG AT IEDM
不详
[J]. ELECTRONIC DESIGN, 1978, 26 (22) : 23 - 24
[5] SCALING MERGED SINGLE-DEVICE-WELL MOSFETS FOR VERY LARGE-SCALE INTEGRATION
ELSAID, MH
ELMASRY, MI
[J]. SOLID-STATE ELECTRONICS, 1981, 24 (10) : 967 - 973
[6] POLYIMIDE FOR MULTILEVEL VERY LARGE-SCALE INTEGRATION (VLSI)
SAMUELSON, G
[J]. ACS SYMPOSIUM SERIES, 1982, 184 : 93 - 106
[7] TOWARD VERY LARGE-SCALE INTEGRATION APPLICATIONS IN SPACE
MOORE, RC
JENKINS, RE
[J]. JOHNS HOPKINS APL TECHNICAL DIGEST, 1984, 5 (04): : 363 - 369
[8] ION-IMPLANTATION FOR VERY LARGE-SCALE INTEGRATION
RYSSEL, H
[J]. ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS, 1982, 58 : 191 - 269
[9] A COMPARISON OF GETTERING TECHNIQUES FOR VERY LARGE-SCALE INTEGRATION
CEROFOLINI, GF
POLIGNANO, ML
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (02) : 579 - 585
[10] ADVANCED METALLIZATION OF VERY-LARGE-SCALE INTEGRATION DEVICES
JOSWIG, H
KOHLHASE, A
KUCHER, P
[J]. THIN SOLID FILMS, 1989, 175 : 17 - 22

← 1 2 3 4 5 →