ADVANCED DEVICE ISOLATION FOR VERY LARGE-SCALE INTEGRATION

被引：0
|
作者：
POGGE, HB
机构：
来源：
ACS SYMPOSIUM SERIES | 1985年 / 290卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：241 / 275
页数：35
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