VERY LARGE-SCALE INTEGRATION TO BE VERY BIG AT IEDM

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TM [电工技术]; TN [电子技术、通信技术];

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页码：23 / 24

页数：2

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[J]. MICROPROCESSING AND MICROPROGRAMMING, 1984, 13 (02): : 121 - 130
[2] VERY LARGE-SCALE INTEGRATION IN MICROELECTRONICS
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[J]. RECHERCHE, 1980, 11 (116): : 1246 - 1256
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[J]. ACS SYMPOSIUM SERIES, 1982, 184 : 93 - 106
[6] ADVANCED DEVICE ISOLATION FOR VERY LARGE-SCALE INTEGRATION
POGGE, HB
[J]. ACS SYMPOSIUM SERIES, 1985, 290 : 241 - 275
[7] ION-IMPLANTATION FOR VERY LARGE-SCALE INTEGRATION
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[J]. ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS, 1982, 58 : 191 - 269
[8] A COMPARISON OF GETTERING TECHNIQUES FOR VERY LARGE-SCALE INTEGRATION
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[J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (02) : 579 - 585
[9] VERY-LARGE-SCALE INTEGRATION - VERY-LARGE-SCALE BENEFITS
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[J]. BELL LABORATORIES RECORD, 1980, 58 (11): : 360 - 368
[10] INTEGRATED SEMICONDUCTOR CIRCUITS APPROACH VERY LARGE-SCALE INTEGRATION
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[J]. NACHRICHTENTECHNISCHE ZEITSCHRIFT, 1978, 31 (09): : 660 - 668